Invention Grant
- Patent Title: Thin film transistor and method of manufacturing the same
- Patent Title (中): 薄膜晶体管及其制造方法
-
Application No.: US11508530Application Date: 2006-08-22
-
Publication No.: US07868327B2Publication Date: 2011-01-11
- Inventor: Jae Kyeong Jeong , Hyun Soo Shin , Se Yeoul Kwon , Yeon Gon Mo
- Applicant: Jae Kyeong Jeong , Hyun Soo Shin , Se Yeoul Kwon , Yeon Gon Mo
- Applicant Address: KR Yongin
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: Knobbe Martens Olson & Bear, LLP.
- Priority: KR10-2005-0109826 20051116; KR10-2005-0115112 20051129; KR10-2005-0115969 20051130; KR10-2005-0120898 20051209
- Main IPC: H01L29/04
- IPC: H01L29/04

Abstract:
A thin film transistor (TFT) and a method of manufacturing the same, and more particularly, a TFT for reducing leakage current and a method of manufacturing the same are provided. The TFT includes a flexible substrate, a diffusion preventing layer formed on the flexible substrate, a buffer layer formed of at least two insulated materials on the diffusion preventing layer, a semiconductor layer formed on a region of the buffer layer to include a channel layer and a source and drain region, a gate insulating layer formed on the buffer layer including the semiconductor layer, a gate electrode formed on the gate insulating layer in a region corresponding to the channel layer, an interlayer insulating layer formed on the gate insulating layer including the gate electrode, and source and drain electrodes formed in the interlayer insulating layer to include a predetermined contact hole that exposes at least a region of the source and drain region and to be connected to the source and drain region.
Public/Granted literature
- US20070108472A1 Thin film transistor and method of manufacturing the same Public/Granted day:2007-05-17
Information query
IPC分类: