Invention Grant
- Patent Title: Non-volatile memory device and fabrication method thereof
- Patent Title (中): 非易失性存储器件及其制造方法
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Application No.: US12136580Application Date: 2008-06-10
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Publication No.: US07868371B2Publication Date: 2011-01-11
- Inventor: Myoung-Soo Kim
- Applicant: Myoung-Soo Kim
- Applicant Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Consulting, PLLC
- Priority: KR10-2007-0068827 20070709
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
In one embodiment, a non-volatile memory device includes an isolation film defining an active region in a semiconductor substrate; a tunnel insulating film located on the active region; a control gate located on the isolation film; an inter-gate dielectric film parallel to the control gate and located between the control gate and the isolation film; an electrode overlapped by the control gate and the inter-gate dielectric film, wherein the electrode extends over the tunnel insulating film on the active region to form a floating gate; and a source region and a drain region formed in the active region on both sides of the floating gate.
Public/Granted literature
- US20090014766A1 NON-VOLATILE MEMORY DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2009-01-15
Information query
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