Invention Grant
- Patent Title: Multibit electro-mechanical memory device having at least one cantilever electrode and at least one gate line and manufacturing method thereof
- Patent Title (中): 具有至少一个悬臂电极和至少一个栅极线的多位机电存储器件及其制造方法
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Application No.: US12289851Application Date: 2008-11-06
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Publication No.: US07868401B2Publication Date: 2011-01-11
- Inventor: Ji-Myoung Lee , Min-Sang Kim , Sung-Min Kim , Keun-Hwi Cho
- Applicant: Ji-Myoung Lee , Min-Sang Kim , Sung-Min Kim , Keun-Hwi Cho
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L29/76 ; H01L21/00 ; G11C11/417

Abstract:
Provided are a multibit electro-mechanical memory device and a method of manufacturing the same. The device may include at least one bit line in a first direction on a substrate; at least one gate line and at least one lower word line in parallel by a given interval and in a second direction intersecting the first direction on the at least one bit line; at least one contact pad adjacent to the at least one gate line on the at least one bit line; and at least one cantilever electrode coupled to the at least one contact pad, configured to float with a void above and beneath the at least one cantilever electrode and configured to curve in a third direction vertical to the first and second directions.
Public/Granted literature
- US20090115009A1 Multibit electro-mechanical memory device and manufacturing method thereof Public/Granted day:2009-05-07
Information query
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