Invention Grant
- Patent Title: Embedded interconnects, and methods for forming same
- Patent Title (中): 嵌入式互连及其形成方法
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Application No.: US12478105Application Date: 2009-06-04
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Publication No.: US07868461B2Publication Date: 2011-01-11
- Inventor: Haining Yang , Thomas W. Dyer
- Applicant: Haining Yang , Thomas W. Dyer
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent H. Daniel Schnurmann
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L21/336

Abstract:
The present invention relates to a semiconductor device comprising first and second active device regions that are located in a semiconductor substrate and are isolated from each other by an isolation region therebetween, while the semiconductor device comprises a first conductive interconnect structure that is embedded in the isolation region and connects the first active device region with the second active device region. The semiconductor device preferably contains at least one static random access memory (SRAM) cell located in the semiconductor substrate, and the first conductive interconnect structure cross-connects a pull-down transistor of the SRAM cell with a pull-up transistor thereof. The conductive interconnect preferably comprises doped polysilicon and can be formed by processing steps including photolithographic patterning, etching, and polysilicon deposition.
Public/Granted literature
- US20090236685A1 EMBEDDED INTERCONNECTS, AND METHODS FOR FORMING SAME Public/Granted day:2009-09-24
Information query
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