Invention Grant
- Patent Title: Probe card and method for fabricating the same
- Patent Title (中): 探针卡及其制造方法
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Application No.: US12114840Application Date: 2008-05-05
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Publication No.: US07868636B2Publication Date: 2011-01-11
- Inventor: In-Buhm Chung
- Applicant: In-Buhm Chung
- Applicant Address: KR Suwon-si
- Assignee: AMST Co., Ltd.
- Current Assignee: AMST Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2007-0046099 20070511; KR10-2007-0088270 20070831
- Main IPC: G01R31/26
- IPC: G01R31/26

Abstract:
A probe card for testing semiconductor chips on a semiconductor wafer, includes a circuit board receiving electrical signals from outside, a plurality of unit probe modules contacting the semiconductor chips on the wafer to transfer the electrical signals, a space transformer having the plurality of probe modules seated on the upper portion thereof and electrically connected to the circuit board, wherein the respective probe modules are arranged at intervals from each other on the space transformer and the space transformer has vertical apertures penetrating through it up and down, and at least one vertical conductive medium electrically connecting the respective unit probe modules and the circuit board, wherein the vertical conductive medium is arranged in the vertical apertures provided in the space transformer and the respective unit probe modules are arranged at positions spaced from the vertical conductive medium.
Public/Granted literature
- US20080278188A1 PROBE CARD AND METHOD FOR FABRICATING THE SAME Public/Granted day:2008-11-13
Information query