Invention Grant
US07868909B2 Method and apparatus for multi-beam exposure 失效
多光束曝光的方法和装置

  • Patent Title: Method and apparatus for multi-beam exposure
  • Patent Title (中): 多光束曝光的方法和装置
  • Application No.: US11224985
    Application Date: 2005-09-14
  • Publication No.: US07868909B2
    Publication Date: 2011-01-11
  • Inventor: Ichirou Miyagawa
  • Applicant: Ichirou Miyagawa
  • Applicant Address: JP Tokyo
  • Assignee: FUJIFILM Corporation
  • Current Assignee: FUJIFILM Corporation
  • Current Assignee Address: JP Tokyo
  • Agent Sheldon J. Moss; Chad M. Herring
  • Priority: JP2004-272388 20040917; JP2004-272389 20040917; JP2004-272391 20040917
  • Main IPC: B41J2/47
  • IPC: B41J2/47
Method and apparatus for multi-beam exposure
Abstract:
A multi-beam exposure apparatus of the present invention includes a two-dimensional light modulator which is configured to project plural exposure beam spots onto an exposure surface, the plural exposure beam spots being arranged in parallel with the scanning direction while two-dimensionally arrayed; and a pixel block shifting member which divides the plural beam spots into plural blocks in the scanning direction and projects the plural exposure beam spots onto the exposure surface by shifting a relative position between the blocks in a direction orthogonal to a scanning direction, and thereby the scan-exposing of a space between the exposure beam spots in the direction orthogonal to the scanning direction is performed with the exposure beam spot of another block. According to the multi-beam exposure apparatus, the number of dots which can simultaneously be exposed in the direction orthogonal to the scanning direction can be increased.
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