Invention Grant
US07869001B2 Eddy current damper, and lithographic apparatus having an eddy current damper 有权
涡流阻尼器和具有涡流阻尼器的光刻设备

Eddy current damper, and lithographic apparatus having an eddy current damper
Abstract:
An eddy current damper has an electrically conducting body having a face, and an array of magnets extending over the face of the conducting body. Each magnet generates a magnetic field directed essentially transversely to the face of the conducting body. The magnet array generates oppositely directed magnetic fields each having a field width. At least one of the magnetic fields generated by the magnets has a field width that is smaller than a field width of an adjacent magnetic field. The conducting body may have an opening having a width that is smaller than a field width of a corresponding magnetic field.
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