Invention Grant
- Patent Title: Eddy current damper, and lithographic apparatus having an eddy current damper
- Patent Title (中): 涡流阻尼器和具有涡流阻尼器的光刻设备
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Application No.: US11594233Application Date: 2006-11-08
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Publication No.: US07869001B2Publication Date: 2011-01-11
- Inventor: Juraj Makarovic
- Applicant: Juraj Makarovic
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03B27/62

Abstract:
An eddy current damper has an electrically conducting body having a face, and an array of magnets extending over the face of the conducting body. Each magnet generates a magnetic field directed essentially transversely to the face of the conducting body. The magnet array generates oppositely directed magnetic fields each having a field width. At least one of the magnetic fields generated by the magnets has a field width that is smaller than a field width of an adjacent magnetic field. The conducting body may have an opening having a width that is smaller than a field width of a corresponding magnetic field.
Public/Granted literature
- US20080106361A1 Eddy current damper, and lithographic apparatus having an eddy current damper Public/Granted day:2008-05-08
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