Invention Grant
US07869020B1 Fourier filters, inspection systems, and systems for fabricating fourier filters 有权
傅立叶滤波器,检查系统和用于制造傅立叶滤波器的系统

  • Patent Title: Fourier filters, inspection systems, and systems for fabricating fourier filters
  • Patent Title (中): 傅立叶滤波器,检查系统和用于制造傅立叶滤波器的系统
  • Application No.: US11683554
    Application Date: 2007-03-08
  • Publication No.: US07869020B1
    Publication Date: 2011-01-11
  • Inventor: Shing Lee
  • Applicant: Shing Lee
  • Applicant Address: US CA Milpitas
  • Assignee: KLA-Tencor Technologies Corp.
  • Current Assignee: KLA-Tencor Technologies Corp.
  • Current Assignee Address: US CA Milpitas
  • Agent Ann Marie Mewherter
  • Main IPC: G01N21/00
  • IPC: G01N21/00
Fourier filters, inspection systems, and systems for fabricating fourier filters
Abstract:
Fourier filters, inspection systems, and systems for fabricating Fourier filters are provided. One Fourier filter configured for use in an inspection system includes a substrate that is substantially transparent to light from a specimen illuminated by the inspection system. The Fourier filter also includes an array of patterned features formed on the substrate. The patterned features are formed of one or more pigments on the substrate. The patterned features are configured to block light reflected and diffracted from structures on the specimen and to allow light scattered from defects on the specimen to pass through the substrate.
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