Invention Grant
US07869023B2 System for detecting anomalies and/or features of a surface 有权
用于检测表面的异常和/或特征的系统

System for detecting anomalies and/or features of a surface
Abstract:
A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam.
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