Invention Grant
- Patent Title: System for detecting anomalies and/or features of a surface
- Patent Title (中): 用于检测表面的异常和/或特征的系统
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Application No.: US12123393Application Date: 2008-05-19
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Publication No.: US07869023B2Publication Date: 2011-01-11
- Inventor: Guoheng Zhao , Stanley Stokowski , Mehdi Vaez-Iravani
- Applicant: Guoheng Zhao , Stanley Stokowski , Mehdi Vaez-Iravani
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: David Wright Tremaine LLP
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam.
Public/Granted literature
- US20080218762A1 System For Detecting Anomalies And/Or Features of a Surface Public/Granted day:2008-09-11
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