Invention Grant
- Patent Title: Process control monitors for interferometric modulators
- Patent Title (中): 过程控制监视器用于干涉式调制器
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Application No.: US11841633Application Date: 2007-08-20
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Publication No.: US07869055B2Publication Date: 2011-01-11
- Inventor: William Cummings , Brian Gally
- Applicant: William Cummings , Brian Gally
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Bear, LLP
- Main IPC: G01B9/02
- IPC: G01B9/02
Abstract:
Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide information regarding properties of the MEMS device and components or sub-components in the device. This information can be used to identify errors in processing or to optimize the MEMS device. In some embodiments, analysis of the process control monitors may utilize optical measurements.
Public/Granted literature
- US20080002206A1 PROCESS CONTROL MONITORS FOR INTERFEROMETRIC MODULATORS Public/Granted day:2008-01-03
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