Invention Grant
US07869056B2 Linear displacement and tilting angle measuring device 有权
线性位移和倾斜角度测量装置

Linear displacement and tilting angle measuring device
Abstract:
A tilting angle measuring device includes an optical device, a four-quadrant optical detector and a computing unit. By the optical device, a light beam emitted by the coherent light source is processed into a reference beam and a test beam. The four-quadrant optical detector has four photoelectric converting units arranged in an array for respectively receiving the reference and test beams. The computing unit is electrically connected to the four-quadrant optical detector for computing a tilting angle of the object with respect to a predetermined position according to four intensity values of the test beam.
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