Invention Grant
- Patent Title: Projection objective and projection exposure apparatus with negative back focus of the entry pupil
- Patent Title (中): 投影目标和投影曝光装置,具有负入门瞳孔的后焦点
-
Application No.: US11689672Application Date: 2007-03-22
-
Publication No.: US07869138B2Publication Date: 2011-01-11
- Inventor: Hans-Juergen Mann , Wolfgang Singer
- Applicant: Hans-Juergen Mann , Wolfgang Singer
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102006014380 20060327
- Main IPC: G02B17/00
- IPC: G02B17/00

Abstract:
The disclosure concerns a projection objective, which can include an object plane in which an object field is formed, an entry pupil, a mirrored entry pupil (RE) in a mirrored entry pupil plane obtained by mirroring the entry pupil (VE) at the object plane, an image plane, an optical axis, at least a first mirror and a second mirror. The projection objective can have a negative back focus of the entry pupil, and a principal ray originating from a central point of the object field and traversing the objective from the object plane to the image plane can intersect the optical axis in at least one point of intersection, wherein the geometric locations of all points of intersection lie between the image plane and the mirrored entry pupil plane.
Public/Granted literature
- US20070223112A1 PROJECTION OBJECTIVE AND PROJECTION EXPOSURE APPARATUS WITH NEGATIVE BACK FOCUS OF THE ENTRY PUPIL Public/Granted day:2007-09-27
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |