Invention Grant
- Patent Title: Optical assemblies and methods for fabrication of optical assemblies
- Patent Title (中): 用于制造光学组件的光学组件和方法
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Application No.: US11771716Application Date: 2007-06-29
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Publication No.: US07869672B2Publication Date: 2011-01-11
- Inventor: Andreas Goebel , Lawrence C. West , Gregory L. Wojcik
- Applicant: Andreas Goebel , Lawrence C. West , Gregory L. Wojcik
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Townsend and Townsend and Crew LLP
- Main IPC: G02B6/28
- IPC: G02B6/28 ; G02B6/12 ; G02B6/26 ; G02B6/34 ; G02B6/42 ; G02B5/18 ; H04J14/00 ; H04J14/02
Abstract:
An optical assembly is formed with a silicon substrate having a first surface and a second surface confronting the first surface. A reflective coating is formed over the first surface. Multiple diffraction gratings are formed integrally within the second surface of the silicon substrate. An optical absorber is formed over the second surface between the diffraction gratings.
Public/Granted literature
- US20080124084A1 OPTICAL ASSEMBLIES AND METHODS FOR FABRICATION OF OPTICAL ASSEMBLIES Public/Granted day:2008-05-29
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