Invention Grant
US07869893B2 Exposure apparatus 有权
曝光装置

Exposure apparatus
Abstract:
An exposure apparatus includes a plurality of stations and a plurality of substrate stages, and exposes a substrate to radiant energy by executing a plurality of jobs using the plurality of stations and the plurality of substrate stages. The apparatus includes a controller configured to acquire the plurality of jobs, and to determine an execution sequence of the plurality of jobs. One of the plurality of substrate stages includes a measurement unit that is different from any measurement unit included in another of the plurality of substrate stages in what to measure. The controller is configured to determine the execution sequence of the plurality of jobs based on information of respective positions of the plurality of substrate stages, information of measurement units that the plurality of substrate stages respectively have, and information of the measurement units respectively necessary for the plurality of jobs.
Public/Granted literature
Information query
Patent Agency Ranking
0/0