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US07870520B2 Semiconductor device and yield calculation method 有权
半导体器件和产量计算方法

Semiconductor device and yield calculation method
Abstract:
A semiconductor device yield calculation method and a computer program that include selecting from a designed device pattern a specified first pattern and a second pattern that differs from the first pattern, finding a probability that the second pattern passes a test when the first pattern passes the test for each of a plurality of distances between the first pattern and the second pattern, and finding a yield of the device pattern based on a product of the probability and a yield value for the first pattern.
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