Invention Grant
- Patent Title: Getter metal alloy coating and device and method for the production thereof
- Patent Title (中): 吸收剂金属合金涂层及其制造方法
-
Application No.: US10505254Application Date: 2003-02-27
-
Publication No.: US07871679B2Publication Date: 2011-01-18
- Inventor: Hartmut Reich-Sprenger
- Applicant: Hartmut Reich-Sprenger
- Applicant Address: DE Darmstadt
- Assignee: Gesellschaft fuer Schwerionenforschung mbH
- Current Assignee: Gesellschaft fuer Schwerionenforschung mbH
- Current Assignee Address: DE Darmstadt
- Agency: Frommer Lawrence & Haug LLP
- Agent Ronald R. Santucci
- Priority: DE10209423 20020305
- International Application: PCT/EP03/02031 WO 20030227
- International Announcement: WO03/074753 WO 20030912
- Main IPC: H05H1/48
- IPC: H05H1/48

Abstract:
The invention relates to a coating comprising a getter metal alloy and to an arrangement and method for the production thereof. The coating therein consists of a non-vaporizing getter metal alloy (2) for an inner wall (3) of a high-vacuum vessel (4). The arrangement basically consists of a metal plasma generator (7), which in turn comprises an insulator member (8), which carries an ignition electrode (9) and a cathode wire (10) comprising a getter metal alloy (2). Those three components are surrounded by a cage-like anode member (13), which together with the insulation member (8) projects into the high vacuum vessel (5) to be coated and is supplied with cathode potential (12), high-voltage ignition pulse (19) and anode potential (14) by a voltage supply device (16), the anode member (13) together with the high-vacuum vessel (4) being held at ground potential.
Public/Granted literature
- US20050164028A1 Getter metal alloy coating and device and method for the production thereof Public/Granted day:2005-07-28
Information query
IPC分类: