Invention Grant
US07871752B2 Lactone-containing compound, polymer, resist composition, and patterning process
有权
含内酯的化合物,聚合物,抗蚀剂组合物和图案化工艺
- Patent Title: Lactone-containing compound, polymer, resist composition, and patterning process
- Patent Title (中): 含内酯的化合物,聚合物,抗蚀剂组合物和图案化工艺
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Application No.: US11878759Application Date: 2007-07-26
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Publication No.: US07871752B2Publication Date: 2011-01-18
- Inventor: Koji Hasegawa , Tsunehiro Nishi , Takeshi Kinsho , Seiichiro Tachibana
- Applicant: Koji Hasegawa , Tsunehiro Nishi , Takeshi Kinsho , Seiichiro Tachibana
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2006-206233 20060728
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/30

Abstract:
Lactone-containing compounds having formula (1) are novel wherein R1 is H, F, methyl or trifluoromethyl, R2 and R3 are monovalent hydrocarbon groups, or R2 and R3 may together form an aliphatic hydrocarbon ring, R4 is H or CO2R5, R5 is a monovalent hydrocarbon group, W is CH2, O or S, and k1 is 0 or 1. They are useful as monomers to produce polymers which are transparent to radiation≦500 nm. Radiation-sensitive resist compositions comprising the polymers as base resin exhibit excellent properties including resolution, pattern edge roughness, pattern density dependency and exposure margin.
Public/Granted literature
- US20080026331A1 Lactone-containing compound, polymer, resist composition, and patterning process Public/Granted day:2008-01-31
Information query
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