Invention Grant
- Patent Title: Method for fabricating carbon-enriched film
- Patent Title (中): 碳富集膜的制造方法
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Application No.: US12689221Application Date: 2010-01-18
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Publication No.: US07871852B2Publication Date: 2011-01-18
- Inventor: Wen-Jian Shen , Yi-Lung Kao , Shuenn-Jiun Tang , Chih-Kwang Tzen
- Applicant: Wen-Jian Shen , Yi-Lung Kao , Shuenn-Jiun Tang , Chih-Kwang Tzen
- Applicant Address: TW Taoyuan
- Assignee: Chunghwa Picture Tubes, Ltd.
- Current Assignee: Chunghwa Picture Tubes, Ltd.
- Current Assignee Address: TW Taoyuan
- Agency: Jianq Chyun IP Office
- Priority: TW94142426A 20051202
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A method for fabricating a carbon-enriched film includes the following steps. First, a substrate is provided. Next, a CFx film (fluorinated carbon films) containing carbon-fluoride bonded molecules is formed on the substrate. Next, a treatment process is performed on the CFx film to convert the carbon-fluoride bonded molecules into carbon-carbon bonded molecules.
Public/Granted literature
- US20100119729A1 METHOD FOR FABRICATING CARBON-ENRICHED FILM Public/Granted day:2010-05-13
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