Invention Grant
US07872210B2 Method for the connection of two wafers, and a wafer arrangement 有权
用于连接两个晶片的方法和晶片装置

Method for the connection of two wafers, and a wafer arrangement
Abstract:
A method for the connection of two wafers (11, 12), in which a contact area (15) is formed between the wafers (11, 12) by placing the two wafers one on top of the other, and in which the contact area (15) is heated locally and for a limited time. A wafer arrangement is also described in which two wafers (11, 12) which have been placed one on top of the other and between whose opposite surfaces a contact area (15) is located. The wafers are connected to one another at selected areas (21) of their contact area.
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