Invention Grant
- Patent Title: Charged particle extraction device and method of design there for
- Patent Title (中): 带电粒子提取装置及其设计方法
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Application No.: US10588981Application Date: 2004-10-16
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Publication No.: US07872242B2Publication Date: 2011-01-18
- Inventor: Roderick Boswell , Orson Sutherland
- Applicant: Roderick Boswell , Orson Sutherland
- Applicant Address: US OR Hillsboro AU Canberra
- Assignee: FEI Company,Australian National University
- Current Assignee: FEI Company,Australian National University
- Current Assignee Address: US OR Hillsboro AU Canberra
- Agency: Scheinberg & Griner, LLP
- Agent Michael O. Scheinberg; David Griner
- Priority: AU2003905709 20031017
- International Application: PCT/US2004/034984 WO 20041016
- International Announcement: WO2005/038821 WO 20050428
- Main IPC: H01J27/00
- IPC: H01J27/00
Abstract:
The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied to the electrodes produce a low-emittance growth beam with substantially zero electric field at the output of the electrodes.
Public/Granted literature
- US20100044580A1 Charged Particle Extraction Device and Method of Design There For Public/Granted day:2010-02-25
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