Invention Grant
- Patent Title: Semiconductor memory device
- Patent Title (中): 半导体存储器件
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Application No.: US12166635Application Date: 2008-07-02
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Publication No.: US07872296B2Publication Date: 2011-01-18
- Inventor: Takayuki Okamura
- Applicant: Takayuki Okamura
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-177598 20070705
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
A semiconductor memory device includes a semiconductor substrate having a projection, an upper end portion of the projection being curved, a first element isolation insulating film formed on the substrate surface at the root of the projection, having an upper surface lower than an upper surface of the projection, a second element isolation insulating film formed in the projection, a gate insulating film formed on the projection, and including a charge storage layer, and a gate electrode formed on the gate insulating film. A height of a first portion where the gate electrode is in contact with the gate insulating film above the upper surface of the first element isolation insulating film is smaller than that of a second portion where the gate electrode is in contact with the gate insulating film above an upper end of the second element isolation insulating film.
Public/Granted literature
- US20090008704A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2009-01-08
Information query
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