Invention Grant
- Patent Title: Power semiconductor component with plate capacitor structure
- Patent Title (中): 功率半导体元件具有平板电容器结构
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Application No.: US11382838Application Date: 2006-05-11
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Publication No.: US07872300B2Publication Date: 2011-01-18
- Inventor: Uwe Wahl , Armin Willmeroth
- Applicant: Uwe Wahl , Armin Willmeroth
- Applicant Address: DE München
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE München
- Agency: Coats & Bennett, P.L.L.C.
- Priority: DE102005023026 20050513
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L21/8238

Abstract:
A power semiconductor component (1) contains a weakly doped drift zone (9), a drain zone (10) and a MOS structure (12) situated at the front side (2) of the power semiconductor component (1). An edge plate (6) of the first conductivity type is provided at its edge (8) above the drift zone (9). The edge plate (6) is doped more highly than the drift zone (9). Situated above the edge plate (6) is an insulation layer (24) with an overlying field plate (7) made of polysilicon. The field plate (7) forms together with the edge plate (6) a plate capacitor structure which increases the drain-source output capacitance of the power semiconductor component (1), so that fewer radiofrequency interference disturbances are caused by the power semiconductor component (1) during switching.
Public/Granted literature
- US20060261375A1 Power Semiconductor Component with Plate Capacitor Structure Public/Granted day:2006-11-23
Information query
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