Invention Grant
US07872319B2 Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure
有权
可偏转结构，包括其的微机械结构以及用于调整微机械结构的方法
- Patent Title: Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure
- Patent Title (中): 可偏转结构，包括其的微机械结构以及用于调整微机械结构的方法
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Application No.: US12045117Application Date: 2008-03-10
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Publication No.: US07872319B2Publication Date: 2011-01-18
- Inventor: Christian Drabe
- Applicant: Christian Drabe
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Keating & Bennett, LLP
- Priority: DE102007015726 20070402
- Main IPC: H01L29/72
- IPC: H01L29/72
Abstract:
A deflectable structure includes a layer having a first area and a second area, a trench structure in the layer which penetrates the layer and separates the first area from the second area, a first junction between the first area and the second area, and a second junction between the first area and the second area, the first area being permanently moveable from a first, permanent position with regard to the second area to a second position, deflected as compared to the first position, with regard to the second area by applying a force.
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