Invention Grant
US07872432B2 MEMS thermal device with slideably engaged tether and method of manufacture 有权
具有可滑动接合系绳的MEMS热敏装置及其制造方法

MEMS thermal device with slideably engaged tether and method of manufacture
Abstract:
A MEMS thermal switch is disclosed which couples a hot, expanding beam to a cool flexor beam using a slideably engaged tether, and bends the cool, flexor beam by the expansion of the hot beam. A rigidly engaged tether ties the distal ends of the hot, expanding beam and the cool, flexor beam together, whereas the slideably engaged tether allows the hot, expanding beam to elongate with respect to the cool, flexor beam, without loading the slideably engaged tether with a large shear force. As a result, the material of the tether can be made stiffer, and therefore transmit the bending force of the hot, expanding beam more efficiently to the cool, flexor beam.
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