Invention Grant
- Patent Title: Tracking type laser interferometer and method for resetting the same
- Patent Title (中): 跟踪型激光干涉仪及其复位方法
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Application No.: US12141487Application Date: 2008-06-18
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Publication No.: US07872733B2Publication Date: 2011-01-18
- Inventor: Naoyuki Taketomi , Sinichirou Yanaka
- Applicant: Naoyuki Taketomi , Sinichirou Yanaka
- Applicant Address: JP Kawasaki-shi, Kanagawa
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kawasaki-shi, Kanagawa
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2007-162295 20070620
- Main IPC: G01C3/08
- IPC: G01C3/08

Abstract:
A tracking type laser interferometer that detects displacement of a retroreflector 300 being an object to be measured by utilizing interference of a laser beam 102 irradiated onto the retroreflector 300 and reflected by the retroreflector 300 in the returning direction, and carries out tracking by means of a two-axis turning mechanism 240 using displacement in the position of the optical axis of the laser beam 102; the same tracking type laser interferometer, includes; a light irradiator 600 that emits a fan-shaped laser light 602 that is fan-shaped including the optical axis of the laser beam 102, is interlocked with turning movements of the two-axis turning mechanism 240 around an axis orthogonal to the center axis of the corresponding fan shape; and a light receptor 620 that has a specific positional relationship with the retroreflector 300 or the light irradiator 600 and receives the fan-shaped laser light. Thereby, tracking can be automatically reset when the tracking is disabled due to a reason such as interruption of laser light or initial adjustment work can be automated when commencing measurement.
Public/Granted literature
- US20080316497A1 TRACKING TYPE LASER INTERFEROMETER AND METHOD FOR RESETTING THE SAME Public/Granted day:2008-12-25
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