Invention Grant
US07875516B2 Integrated circuit including a first gate stack and a second gate stack and a method of manufacturing
有权
包括第一栅极堆叠和第二栅极堆叠的集成电路及其制造方法
- Patent Title: Integrated circuit including a first gate stack and a second gate stack and a method of manufacturing
- Patent Title (中): 包括第一栅极堆叠和第二栅极堆叠的集成电路及其制造方法
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Application No.: US11855695Application Date: 2007-09-14
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Publication No.: US07875516B2Publication Date: 2011-01-25
- Inventor: Roman Knoefler , Michael Specht , Josef Willer
- Applicant: Roman Knoefler , Michael Specht , Josef Willer
- Applicant Address: DE Munich
- Assignee: Qimonda AG
- Current Assignee: Qimonda AG
- Current Assignee Address: DE Munich
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: H01L21/8234
- IPC: H01L21/8234

Abstract:
An integrated circuit including a first gate stack and a second gate stack and a method of manufacturing is disclosed. One embodiment provides non-volatile memory cells including a first gate stack and a gate dielectric on a first surface section of a main surface of a semiconductor substrate, and a second gate stack including a memory layer stack on a second surface section. A first pattern is transferred into the first gate stack and a second pattern into the second gate stack.
Public/Granted literature
- US20090072274A1 INTEGRATED CIRCUIT INCLUDING A FIRST GATE STACK AND A SECOND GATE STACK AND A METHOD OF MANUFACTURING Public/Granted day:2009-03-19
Information query
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