Invention Grant
- Patent Title: Electronic device including MEMS devices and holed substrates, in particular of the LGA or BGA type
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Application No.: US12006819Application Date: 2008-01-04
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Publication No.: US07875942B2Publication Date: 2011-01-25
- Inventor: Mario Cortese , Mark Anthony Azzopardi , Edward Myers , Chantal Combi , Lorenzo Baldo
- Applicant: Mario Cortese , Mark Anthony Azzopardi , Edward Myers , Chantal Combi , Lorenzo Baldo
- Applicant Address: IT Agrate Brianza MT Kirkop
- Assignee: STMicroelectronics, S.r.l.,STMicroelectronics (Malta) Ltd.
- Current Assignee: STMicroelectronics, S.r.l.,STMicroelectronics (Malta) Ltd.
- Current Assignee Address: IT Agrate Brianza MT Kirkop
- Agency: Graybeal Jackson LLP
- Agent Lisa K. Jorgenson; Kevin D. Jablonski
- Priority: ITM12007A0007 20070104; ITM12007A0008 20070104
- Main IPC: H01L29/84
- IPC: H01L29/84
Abstract:
An electronic device includes a substrate provided with a passing opening and a MEMS device including an active surface wherein a portion of the MEMS device is integrated sensitive to chemical/physical variations of a fluid. The active surface of the MEMS device faces the substrate and is spaced therefrom, the sensitive portion being aligned to the opening. A protective package incorporates at least partially the MEMS device and the substrate, leaving at least the sensitive portion of the MEMS device, and the opening of the substrate exposed. A barrier element is positioned in an area which surrounds the sensitive portion to realize a protection structure for the MEMS device, so that the sensitive portion is free.
Public/Granted literature
- US20080179697A1 Electronic device including MEMS devices and holed substrates, in particular of the LGA or BGA type Public/Granted day:2008-07-31
Information query
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