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US07876492B2 Spatial light modulator and mirror array device 失效
空间光调制器和镜阵列器件

Spatial light modulator and mirror array device
Abstract:
The present invention provides a spatial light modulator, comprising: a plurality of mirror elements; a plurality of address electrodes for controlling the movement of each of the mirror elements; and first and second control circuits for generating a voltage in the address electrode, wherein the second control circuit applies a voltage to the address electrode when the mirror element is in a moving state.
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