Provided are a method and apparatus directed to hybrid electromagnetic processing devices. The apparatus includes a planar integrated optical device. The planar integrated optical device has at least one input optical waveguide, a free space optical region and a plurality of output optical waveguides. The optical waveguides end connecting to the free space optical region. The at least one input optical waveguide has an offset in a core thereof at joined ends of an input portion and an output portion of the at least one input optical waveguide.