Invention Grant
- Patent Title: Method for fabricating an angular velocity sensor
- Patent Title (中): 制造角速度传感器的方法
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Application No.: US12036585Application Date: 2008-02-25
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Publication No.: US07877848B2Publication Date: 2011-02-01
- Inventor: Hiroshi Tanaka , Yuki Endo , Masanori Yachi , Kazutaka Araya , Yoshinori Uwano
- Applicant: Hiroshi Tanaka , Yuki Endo , Masanori Yachi , Kazutaka Araya , Yoshinori Uwano
- Applicant Address: JP Nagano Prefecture
- Assignee: Tamagawa Seiki Co., Ltd
- Current Assignee: Tamagawa Seiki Co., Ltd
- Current Assignee Address: JP Nagano Prefecture
- Agency: Arent Fox, LLP
- Priority: JP2007-043363 20070223
- Main IPC: H01L41/22
- IPC: H01L41/22 ; B23P17/00 ; G01P3/44
Abstract:
An angular velocity sensor includes a tuning-fork vibrator having a base and multiple arms extending from the base. Two arms out of the multiple arms driven to vibrate have first end parts opposite to second end parts connected to the base. The first end parts being wider than the second end parts.
Public/Granted literature
- US20080202238A1 ANGULAR VELOCITY SENSOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2008-08-28
Information query
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