Invention Grant
US07877860B2 Method of manufacturing a magnetic head for perpendicular magnetic recording 有权
制造用于垂直磁记录的磁头的方法

Method of manufacturing a magnetic head for perpendicular magnetic recording
Abstract:
A method of manufacturing a magnetic head includes the steps of forming an underlying layer, forming a pole layer including a track width defining portion at least by plating, using the underlying layer as an electrode, such that the track width defining portion is disposed on the underlying layer, and removing the underlying layer except a portion below the pole layer by ion beam etching. The underlying layer is made of a conductive material whose etching rate of ion beam etching is higher than that of the magnetic alloy used to make the pole layer.
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