Invention Grant
US07878045B2 Apparatus and use of the apparatus for the determination of the density of a plasma 有权
用于确定等离子体密度的装置和用途

  • Patent Title: Apparatus and use of the apparatus for the determination of the density of a plasma
  • Patent Title (中): 用于确定等离子体密度的装置和用途
  • Application No.: US12294322
    Application Date: 2007-03-23
  • Publication No.: US07878045B2
    Publication Date: 2011-02-01
  • Inventor: Ralf-Peter Brinkmann
  • Applicant: Ralf-Peter Brinkmann
  • Agent Henry M. Feiereisen; Ursula B. Day
  • Priority: DE102006014106 20060324
  • International Application: PCT/DE2007/000542 WO 20070323
  • International Announcement: WO2007/110060 WO 20071004
  • Main IPC: G01N9/32
  • IPC: G01N9/32
Apparatus and use of the apparatus for the determination of the density of a plasma
Abstract:
Device for determining the density of a plasma, with of a probe (1) which can be immersed into the plasma, with a probe head (2) in form of a three-axis ellipsoid, and a handle (3) connected to the probe head (2), wherein the probe head (2) has a sheath (4) and a probe core (5, 5a) surrounded by the sheath (4), wherein the surface (8) of the probe core (5, 5a) has electrode areas (9, 10) of opposite polarity which are insulated from each other. The probe core consists of electrodes (6, 7), to which a signal is applied. The absorption of that signal is measured and evaluated as a function of the frequency. Based on a multipole expansion, a mathematical model is constructed with which the absorption spectrum of the probe can be unambiguously evaluated. For a particular design of the probe, the response can be restricted to a single resonance, from which the electron density of the plasma (to be inferred from the resonance frequency) can be found by an unambiguous evaluation algorithm.
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