Invention Grant
US07878665B2 Holding apparatus for holding optical element above a base, exposure apparatus including the holding apparatus, and device manufacturing method using the exposure apparatus
有权
用于将光学元件保持在基座上方的保持装置，包括保持装置的曝光装置以及使用该曝光装置的装置制造方法
- Patent Title: Holding apparatus for holding optical element above a base, exposure apparatus including the holding apparatus, and device manufacturing method using the exposure apparatus
- Patent Title (中): 用于将光学元件保持在基座上方的保持装置，包括保持装置的曝光装置以及使用该曝光装置的装置制造方法
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Application No.: US12032758Application Date: 2008-02-18
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Publication No.: US07878665B2Publication Date: 2011-02-01
- Inventor: Kouhei Imoto
- Applicant: Kouhei Imoto
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. I.P. Division
- Priority: JP2007-044006 20070223
- Main IPC: G03B21/14
- IPC: G03B21/14
Abstract:
A holding apparatus adapted to hold an optical element above a base includes at least two held members provided at different positions on an outer periphery of the optical element; and holding members provided above the base for respective held members, the holding members being supported above the base by flexure members. Each held member is held by the corresponding holding member in a kinematic coupling.
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