Invention Grant
- Patent Title: Load lock and method for transferring objects
- Patent Title (中): 加载锁和传送对象的方法
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Application No.: US12068072Application Date: 2008-02-01
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Publication No.: US07878755B2Publication Date: 2011-02-01
- Inventor: Albert Jan Hendrik Klomp , Jan Frederik Hoogkamp , Josephus Cornelius Johannes Antonius Vugts , Robert Gordon Livesey , Johannes Hendrikus Gertrudis Franssen
- Applicant: Albert Jan Hendrik Klomp , Jan Frederik Hoogkamp , Josephus Cornelius Johannes Antonius Vugts , Robert Gordon Livesey , Johannes Hendrikus Gertrudis Franssen
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP03075703 20030311
- Main IPC: B65G25/00
- IPC: B65G25/00

Abstract:
A load lock is constructed and arranged to transfer a substrate between a first environment and a second environment and to maintain each of the first environment and the second environment therein. The load lock includes a load lock chamber provided with at least two mutually distinct substrate supports positioned one above the other. Each of the substrate supports includes a substrate displacement element. The load lock also includes an evacuation device constructed and arranged to evacuate the load lock chamber, and a door constructed and arranged to close the load lock chamber during evacuation and for opening the load lock chamber.
Public/Granted literature
- US20080138177A1 Load lock and method for transferring objects Public/Granted day:2008-06-12
Information query
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