Invention Grant
- Patent Title: Silicon carbide manufacturing device and method of manufacturing silicon carbide
- Patent Title (中): 碳化硅制造装置及其制造方法
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Application No.: US11896504Application Date: 2007-09-04
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Publication No.: US07879150B2Publication Date: 2011-02-01
- Inventor: Masao Nagakubo , Fusao Hirose , Yasuo Kitoh
- Applicant: Masao Nagakubo , Fusao Hirose , Yasuo Kitoh
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2006-241642 20060906
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
A silicon carbide manufacturing device includes a graphite crucible, in which a seed crystal is disposed, a gas-inducing pipe coupled with the graphite crucible, and an attachment prevention apparatus. The gas-inducing pipe has a column-shaped hollow part, through which a source gas flows into the graphite crucible. The attachment prevention apparatus includes a rod extending to a flow direction of the source gas, and a revolving and rotating element for revolving the rod along an inner wall of the gas-inducing pipe while rotating the rod on an axis of the rod in parallel to the flow direction.
Public/Granted literature
- US20080053371A1 Silicon carbide manufacturing device and method of manufacturing silicon carbide Public/Granted day:2008-03-06
Information query
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