Invention Grant
US07879150B2 Silicon carbide manufacturing device and method of manufacturing silicon carbide 有权
碳化硅制造装置及其制造方法

Silicon carbide manufacturing device and method of manufacturing silicon carbide
Abstract:
A silicon carbide manufacturing device includes a graphite crucible, in which a seed crystal is disposed, a gas-inducing pipe coupled with the graphite crucible, and an attachment prevention apparatus. The gas-inducing pipe has a column-shaped hollow part, through which a source gas flows into the graphite crucible. The attachment prevention apparatus includes a rod extending to a flow direction of the source gas, and a revolving and rotating element for revolving the rod along an inner wall of the gas-inducing pipe while rotating the rod on an axis of the rod in parallel to the flow direction.
Information query
Patent Agency Ranking
0/0