Invention Grant
- Patent Title: Apparatus for manufacturing flat-panel display
- Patent Title (中): 用于制造平板显示器的装置
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Application No.: US12324256Application Date: 2008-11-26
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Publication No.: US07879181B2Publication Date: 2011-02-01
- Inventor: Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
- Applicant: Young Jong Lee , Jun Young Choi , Saeng Hyun Jo , Hyun Hwan Ahn , Suk-Min Son , Sung Il Ahn
- Applicant Address: KR Sungnam-shi
- Assignee: Advanced Display Process Engineering Co., Ltd.
- Current Assignee: Advanced Display Process Engineering Co., Ltd.
- Current Assignee Address: KR Sungnam-shi
- Agency: KED & Associates, LLP
- Priority: KR10-2004-0079416 20041006; KR10-2004-0083843 20041020; KR10-2004-0094230 20041117; KR10-2004-00102975 20041208; KR10-2004-0111693 20041224
- Main IPC: C23F1/00
- IPC: C23F1/00 ; C23C16/00
Abstract:
Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
Public/Granted literature
- US20090078200A1 APPARATUS FOR MANUFACTURING FLAT-PANEL DISPLAY Public/Granted day:2009-03-26
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