Invention Grant
US07879186B2 Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor
失效
用于在磁场增强等离子体反应器中成形磁场的方法和装置
- Patent Title: Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor
- Patent Title (中): 用于在磁场增强等离子体反应器中成形磁场的方法和装置
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Application No.: US12204408Application Date: 2008-09-04
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Publication No.: US07879186B2Publication Date: 2011-02-01
- Inventor: Roger Alan Lindley , Jingbao Liu , Bryan Y. Pu , Keiji Horioka
- Applicant: Roger Alan Lindley , Jingbao Liu , Bryan Y. Pu , Keiji Horioka
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser IP Law Group
- Main IPC: C23F1/00
- IPC: C23F1/00 ; C23C16/00 ; H01L21/306
Abstract:
A magnetic field generator which provides greater control over the magnetic field is provided. The magnetic field generator has a plurality of overlapping main magnetic coil sections for forming a magnetic field generally parallel to the top surface of the supporting member. In other embodiments, sub-magnetic coil sections are placed symmetrically around the main magnetic coil sections.
Public/Granted literature
- US20090008033A1 METHOD AND APPARATUS FOR SHAPING A MAGNETIC FIELD IN A MAGNETIC FIELD-ENHANCED PLASMA REACTOR Public/Granted day:2009-01-08
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