Invention Grant
- Patent Title: Processes for the purification of trichlorosilane and silicon tetrachloride
- Patent Title (中): 纯化三氯硅烷和四氯化硅的方法
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Application No.: US11719688Application Date: 2005-11-14
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Publication No.: US07879198B2Publication Date: 2011-02-01
- Inventor: Gianfranco Ghetti
- Applicant: Gianfranco Ghetti
- Applicant Address: US MO St. Peters
- Assignee: MEMC Electronic Materials, Inc.
- Current Assignee: MEMC Electronic Materials, Inc.
- Current Assignee Address: US MO St. Peters
- Agency: Armstrong Teasdale LLP
- Priority: ITRM2004A0570 20041119
- International Application: PCT/IT2005/000662 WO 20051114
- International Announcement: WO2006/054325 WO 20060526
- Main IPC: B01D3/14
- IPC: B01D3/14 ; B01D3/34 ; C01B33/107
Abstract:
The present disclosure relates to processes and systems for purifying technical grade trichlorosilane and/or technical grade silicon tetrachloride into electronic grade trichlorosilane and/or electronic grade silicon tetrachloride.
Public/Granted literature
- US20080314728A1 Process and SYSTEM for the Purification of Trichlorosilane and Silicon Tetrachloride Public/Granted day:2008-12-25
Information query
