Invention Grant
US07879222B2 Detection of additive breakdown products in acid copper plating baths 有权
酸性镀铜浴中添加剂分解产物的检测

Detection of additive breakdown products in acid copper plating baths
Abstract:
An additive breakdown product in an acid copper plating bath sample is detected by performing a voltammetric analysis for the leveler additive in two measurement solutions comprising different volume fractions of the copper plating bath sample in a background electrolyte. When the plating bath sample contains a substantial concentration of the additive breakdown product, the analyses for the first and second measurement solutions indicate different concentrations for the leveler additive in the plating bath sample. A comparison of the leveler additive concentrations indicated by the two analyses provides a measure of the concentration of the additive breakdown product.
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