Invention Grant
- Patent Title: Detection of additive breakdown products in acid copper plating baths
- Patent Title (中): 酸性镀铜浴中添加剂分解产物的检测
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Application No.: US11895836Application Date: 2007-08-27
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Publication No.: US07879222B2Publication Date: 2011-02-01
- Inventor: Eugene Shalyt , Michael Pavlov , Peter Bratin
- Applicant: Eugene Shalyt , Michael Pavlov , Peter Bratin
- Applicant Address: US NJ Totowa
- Assignee: ECI Technology, Inc.
- Current Assignee: ECI Technology, Inc.
- Current Assignee Address: US NJ Totowa
- Agent D. Morgan Tench
- Main IPC: G01N27/26
- IPC: G01N27/26

Abstract:
An additive breakdown product in an acid copper plating bath sample is detected by performing a voltammetric analysis for the leveler additive in two measurement solutions comprising different volume fractions of the copper plating bath sample in a background electrolyte. When the plating bath sample contains a substantial concentration of the additive breakdown product, the analyses for the first and second measurement solutions indicate different concentrations for the leveler additive in the plating bath sample. A comparison of the leveler additive concentrations indicated by the two analyses provides a measure of the concentration of the additive breakdown product.
Public/Granted literature
- US20090057151A1 Detection of additive breakdown products in acid copper plating baths Public/Granted day:2009-03-05
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