Invention Grant
- Patent Title: Method and solution to grow charge-transfer complex salts
- Patent Title (中): 生长电荷转移复盐的方法和解决方案
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Application No.: US11880687Application Date: 2007-07-24
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Publication No.: US07879263B2Publication Date: 2011-02-01
- Inventor: Robert Muller , Jan Genoe
- Applicant: Robert Muller , Jan Genoe
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Main IPC: H01B1/12
- IPC: H01B1/12 ; H01B1/20

Abstract:
The present disclosure relates to methods and solutions for growing metal charge-transfer salts on a metal surface, such as a metal layer at the bottom of a via hole. The method makes use of a solution comprising a salt additive. The temperature during growth is in the range of −100° C. to +100° C. The method allows controlled growth of the metal charge transfer salt inside via hole while limiting growth outside the via hole. The method further limits corrosion of the metallic connections at the bottom of the via hole.
Public/Granted literature
- US20080179742A1 Method and solution to grow charge-transfer complex salts Public/Granted day:2008-07-31
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