Invention Grant
US07879527B2 Method of producing positive resist composition, positive resist composition, and method of forming resist pattern
有权
正型抗蚀剂组合物的制造方法,正型抗蚀剂组合物和形成抗蚀剂图案的方法
- Patent Title: Method of producing positive resist composition, positive resist composition, and method of forming resist pattern
- Patent Title (中): 正型抗蚀剂组合物的制造方法,正型抗蚀剂组合物和形成抗蚀剂图案的方法
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Application No.: US11996052Application Date: 2006-05-18
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Publication No.: US07879527B2Publication Date: 2011-02-01
- Inventor: Masaaki Muroi , Kota Atsuchi , Takahiro Nakamura , Masakazu Yamada , Kensuke Saisyo
- Applicant: Masaaki Muroi , Kota Atsuchi , Takahiro Nakamura , Masakazu Yamada , Kensuke Saisyo
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: JP2005-212903 20050722
- International Application: PCT/JP2006/309924 WO 20060518
- International Announcement: WO2007/010667 WO 20070125
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/30

Abstract:
A method of forming a positive resist composition of the present invention includes a step (I) of passing a positive resist composition, which is obtained by dissolving a resin component (A) that displays increased alkali solubility under the action of acid and an acid generator component (B) that generates acid upon exposure in an organic solvent (S), through a filter (f1) equipped with a nylon membrane, wherein the resin component (A) is a copolymer containing at least two structural units obtained by polymerizing at least one monomer in the presence of acid. According to the present invention, it is possible to provide a method of producing a positive resist composition, a positive resist composition, and a method of forming a resist pattern that are capable of forming a resist pattern with reduced levels of both bridge-type defects and reprecipitation-type defects.
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