Invention Grant
US07879527B2 Method of producing positive resist composition, positive resist composition, and method of forming resist pattern 有权
正型抗蚀剂组合物的制造方法,正型抗蚀剂组合物和形成抗蚀剂图案的方法

Method of producing positive resist composition, positive resist composition, and method of forming resist pattern
Abstract:
A method of forming a positive resist composition of the present invention includes a step (I) of passing a positive resist composition, which is obtained by dissolving a resin component (A) that displays increased alkali solubility under the action of acid and an acid generator component (B) that generates acid upon exposure in an organic solvent (S), through a filter (f1) equipped with a nylon membrane, wherein the resin component (A) is a copolymer containing at least two structural units obtained by polymerizing at least one monomer in the presence of acid. According to the present invention, it is possible to provide a method of producing a positive resist composition, a positive resist composition, and a method of forming a resist pattern that are capable of forming a resist pattern with reduced levels of both bridge-type defects and reprecipitation-type defects.
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