Invention Grant
US07879536B2 Method for forming high-resolution pattern having desired thickness or high aspect ratio using dry film resist 有权
使用干膜抗蚀剂形成具有期望厚度或高纵横比的高分辨率图案的方法

Method for forming high-resolution pattern having desired thickness or high aspect ratio using dry film resist
Abstract:
Disclosed herein is a method for forming a pattern, comprising: attaching a single-layer or multi-layer dry film resist made of a semi-solid or solid material to part or all of the surface of a substrate; exposing the dry film resist to light either by irradiating a focusable energy beam directly onto the resist or by projecting a specific wavelength range of light onto the resist, to form a region to be filled with a functional material; charging the functional material into the formed region using a method such as inkjetting; drying the functional material; and removing the dry film resist, thus obtaining the desired pattern.
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