Invention Grant
- Patent Title: Backside illuminated imager and method of fabricating the same
- Patent Title (中): 背面照明成像器及其制造方法
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Application No.: US11712996Application Date: 2007-03-02
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Publication No.: US07879638B2Publication Date: 2011-02-01
- Inventor: Frederick Brady
- Applicant: Frederick Brady
- Applicant Address: KY George Town
- Assignee: Aptina Imaging Corporation
- Current Assignee: Aptina Imaging Corporation
- Current Assignee Address: KY George Town
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A structure and method for fabricating imagers that detect light from the backside of the wafer. The structure may have less complex focusing, reduced crosstalk, tighter pixel packing density, increased quantum efficiency, and wafer-level packaging. The fabrication of the imager includes forming an imaging device on a silicon wafer, adhering an interconnect wafer to the device wafer, forming interconnects on the interconnect wafer, etching away the substrate of the device wafer, and patterning additional layers such as nitrides, color filter arrays, and lenses on the backside of the device wafer.
Public/Granted literature
- US20080211939A1 Backside illuminated imager and method of fabricating the same Public/Granted day:2008-09-04
Information query
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