Invention Grant
- Patent Title: CMOS image sensor and method for fabricating the same
- Patent Title (中): CMOS图像传感器及其制造方法
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Application No.: US11932483Application Date: 2007-10-31
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Publication No.: US07879640B2Publication Date: 2011-02-01
- Inventor: Sang Sik Kim
- Applicant: Sang Sik Kim
- Applicant Address: KR Seoul
- Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Workman Nydegger
- Priority: KR10-2006-0135935 20061228
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A Complementary Metal Oxide Semiconductor (CMOS) image sensor and methods for fabricating the same. In one example embodiment of the invention, a method for manufacturing a Complementary Metal Oxide Semiconductor (CMOS) image sensor includes several acts. First, a metal pad is formed over a semiconductor substrate. Next, a protection film is formed over the semiconductor substrate and the metal pad. Then, the protection film is selectively removed to expose a surface of the metal pad. Next, a first planarization film is formed over the protection film. Then, a color filter layer is formed over the first planarization film. Next, a second planarization layer is formed over the color filter layer. Then, a first material layer is formed over the second planarization layer. Next, a second material layer is formed over the first material layer. Then, a micro lens is formed out of the first and second material layers.
Public/Granted literature
- US20080157154A1 CMOS IMAGE SENSOR AND METHOD FOR FABRICATING THE SAME Public/Granted day:2008-07-03
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