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US07879640B2 CMOS image sensor and method for fabricating the same 有权
CMOS图像传感器及其制造方法

CMOS image sensor and method for fabricating the same
Abstract:
A Complementary Metal Oxide Semiconductor (CMOS) image sensor and methods for fabricating the same. In one example embodiment of the invention, a method for manufacturing a Complementary Metal Oxide Semiconductor (CMOS) image sensor includes several acts. First, a metal pad is formed over a semiconductor substrate. Next, a protection film is formed over the semiconductor substrate and the metal pad. Then, the protection film is selectively removed to expose a surface of the metal pad. Next, a first planarization film is formed over the protection film. Then, a color filter layer is formed over the first planarization film. Next, a second planarization layer is formed over the color filter layer. Then, a first material layer is formed over the second planarization layer. Next, a second material layer is formed over the first material layer. Then, a micro lens is formed out of the first and second material layers.
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