Invention Grant
- Patent Title: Method of providing protection against charging damage in hybrid orientation transistors
- Patent Title (中): 在混合取向晶体管中提供防止充电损坏的方法
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Application No.: US12002807Application Date: 2007-12-19
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Publication No.: US07879650B2Publication Date: 2011-02-01
- Inventor: Terence B. Hook , Anda C. Mocuta , Jeffrey W. Sleight , Anthony K. Stamper
- Applicant: Terence B. Hook , Anda C. Mocuta , Jeffrey W. Sleight , Anthony K. Stamper
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Lisa V. Jaklitsch; Katherine S. Brown; Daryl K. Neff
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
In a method of fabricating a CMOS structure, a bulk device can be formed in a first region in conductive communication with an underlying bulk region of the substrate. A first gate conductor may overlie the first region. An SOI device can be formed which has a source drain conduction path in a SOI layer, i.e., a semiconductor layer that is separated from the bulk region by a buried dielectric region. The crystal orientations of the SOI layer and the bulk region can be different. A first diode can be formed in a second region of the substrate in conductive communication with the bulk region. The first diode may be connected in a reverse-biased orientation to a first gate conductor above the SOI layer, such that a voltage on the gate conductor that exceeds the breakdown voltage can be discharged through the first diode to the bulk region of the substrate. A second diode may be formed in a third region of the substrate in conductive communication with the bulk region. The second diode may be connected in a reverse-biased orientation to a source region or a drain region of an NFET.
Public/Granted literature
- US20080108186A1 Method of providing protection against charging damage in hybrid orientation transistors Public/Granted day:2008-05-08
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