Invention Grant
- Patent Title: Methods of fabricating semiconductor devices including dual fin structures
- Patent Title (中): 制造包括双鳍结构的半导体器件的方法
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Application No.: US11778938Application Date: 2007-07-17
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Publication No.: US07879659B2Publication Date: 2011-02-01
- Inventor: Aaron R. Wilson , Larson Lindholm , David Hwang
- Applicant: Aaron R. Wilson , Larson Lindholm , David Hwang
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Fin-FET (fin field effect transistor) devices and methods of fabrication are disclosed. The Fin-FET devices include dual fin structures that may form a channel region between a source region and a drain region. In some embodiments, the dual fin structures are formed by forming shallow trench isolation structures, using a pair of shallow trench isolation (STI) structures as a mask to define a recess in a portion of the substrate between the pair of STI structures, and recessing the STI structures so that the resulting dual fin structure protrudes from an active surface of the substrate. The dual fin structure may be used to form single-gate, double-gate or triple-gate fin-FET devices. Electronic systems including such fin-FET devices are also disclosed.
Public/Granted literature
- US20090026530A1 METHODS OF FABRICATING DUAL FIN STRUCTURES AND SEMICONDUCTOR DEVICE STRUCTURES WITH DUAL FINS Public/Granted day:2009-01-29
Information query
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