Invention Grant
- Patent Title: Memory and manufacturing method thereof
- Patent Title (中): 其记忆及其制造方法
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Application No.: US11979101Application Date: 2007-10-31
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Publication No.: US07879706B2Publication Date: 2011-02-01
- Inventor: Erh-Kun Lai , Yen-Hao Shih , Ling-Wu Yang , Chun-Min Cheng
- Applicant: Erh-Kun Lai , Yen-Hao Shih , Ling-Wu Yang , Chun-Min Cheng
- Applicant Address: TW
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW
- Agency: Bacon & Thomas PLLC
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L21/4763

Abstract:
A memory having isolated dual memory cells is provided. A first isolation wall and a second isolation wall are separately disposed between a source and a drain on a substrate. An isolation bottom layer and a polysilicon layer are orderly disposed on the substrate between the first and the second isolation walls. A first charge storage structure and a first gate are orderly disposed on the substrate between the first isolation wall and the source. A second charge storage structure and a second gate are orderly disposed on the substrate between the second isolation wall and the drain. A word line disposed on the polysilicon layer, the first gate, the second gate, the first isolation wall and the second isolation wall is electrically connected to the first gate, the second gate and the polysilicon layer.
Public/Granted literature
- US20090108331A1 Memory and manufacturing method thereof Public/Granted day:2009-04-30
Information query
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