Invention Grant
- Patent Title: Aqueous cleaning composition and method for using same
- Patent Title (中): 水性清洗组合物及其使用方法
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Application No.: US11249207Application Date: 2005-10-13
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Publication No.: US07879782B2Publication Date: 2011-02-01
- Inventor: Aiping Wu , Roberto John Rovito
- Applicant: Aiping Wu , Roberto John Rovito
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Rosaleen P. Morris-Oskanian; Anne B. Kiernan
- Main IPC: C11D7/32
- IPC: C11D7/32

Abstract:
An aqueous-based composition and method comprising same for removing residues such as without limitation post-ashed and/or post-etched photoresist from a substrate is described herein. In one aspect, there is provided a composition for removing residues comprising: water; at least one selected from a hydroxylamine, a hydroxylamine salt compound, and mixtures thereof; and a corrosion inhibitor wherein the composition is substantially free of an added organic solvent and provided that the corrosion inhibitor does not contain a water soluble organic acid.
Public/Granted literature
- US20070087948A1 Aqueous cleaning composition and method for using same Public/Granted day:2007-04-19
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