Invention Grant
- Patent Title: Stripping agent composition for a resist
- Patent Title (中): 抗蚀剂的剥离剂组合物
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Application No.: US10910338Application Date: 2004-08-04
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Publication No.: US07879784B2Publication Date: 2011-02-01
- Inventor: Mami Shirota
- Applicant: Mami Shirota
- Applicant Address: JP Tokyo
- Assignee: KAO Corporation
- Current Assignee: KAO Corporation
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2003-286871 20030805
- Main IPC: C11D3/22
- IPC: C11D3/22 ; C11D3/24 ; C11D3/30 ; C11D3/43 ; C11D3/44

Abstract:
A stripping agent composition for a resist, containing (A) 0.1 to 10% by weight of an amine; (B) 80 to 99% by weight of an organic solvent having a Hansen's solubility parameter of from 18 to 33 MPa1/2; (C) 0.01 to 3% by weight of a sugar; and (D) 0 to 5% by weight of water; a method for stripping a resist, including the step of stripping the resist with the stripping agent composition; and a method for manufacturing a semiconductor device, including the step of stripping a resist with the stripping agent composition. By using the stripping composition of the present invention, for example, a high-quality IC or LSI semiconductor device circuit, especially a compound semiconductor device circuit can be more economically advantageously manufactured.
Public/Granted literature
- US20050032659A1 Stripping agent composition for a resist Public/Granted day:2005-02-10
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