Invention Grant
US07880201B2 Optical modulator using a serpentine dielectric layer between silicon layers
有权
在硅层之间使用蛇形电介质层的光学调制器
- Patent Title: Optical modulator using a serpentine dielectric layer between silicon layers
- Patent Title (中): 在硅层之间使用蛇形电介质层的光学调制器
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Application No.: US11558289Application Date: 2006-11-09
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Publication No.: US07880201B2Publication Date: 2011-02-01
- Inventor: Yurii A. Vlasov , Fengnian Xia
- Applicant: Yurii A. Vlasov , Fengnian Xia
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/06 ; H01L31/0352 ; H03C3/00
Abstract:
The present invention is a method and an apparatus for optical modulation, for example for use in optical communications links. In one embodiment, an apparatus for optical modulation includes a first silicon layer having one or more trenches formed therein, a dielectric layer lining the first silicon layer, and a second silicon layer disposed on the dielectric layer and filling the trenches.
Public/Granted literature
- US20080112032A1 Method and Apparatus for Optical Modulation Public/Granted day:2008-05-15
Information query
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